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Cypress can offer a wide variety of tools and associated processes, including 65nm node capabilities.
| MASK |
| 193nm litho |
ASML XT:1250  Sokudo RF3
/1100 200W |
| 248nm litho |
ASML /850, /750, /300 |
| 365 nm litho |
ASML /400, /250, /100 |
| CD-SEM |
AMAT VeraSem, Verity |
| Registration |
KLAT Archer AIM, 5300, 5200 |
| Stabilization |
Fusion 200 PCU |
| Polyimide |
8.5µm Photo-imageable |
| Reticle Handling |
DMS with automated particle/pellicle damage detection and blow-off |
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| ETCH |
| Oxide / Nitride Etch |
AMAT Centura SuperE, EMAX, MxP |
| Poly / Silicon Etch |
AMAT DPS II, LAM 9400
4400 SE2 TCP |
| Metal Etch |
LAM 2300 Versys, LAM 9600 |
| Wet Cleans |
Akrion Gama wet benches
Semitool SST w/EKC265, SEZ DaVinci, SEZ 223 backside cleans |
| Ash / Dry Strip |
Novellus/Gasonics PEP 3010, Novellus Iridia, Mattson Aspen |
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| FILMS |
| PECVD |
Novellus C1 Nitride, Oxide, BPSG C2 TEOS, HDP for trench and PSG |
| LPCVD |
Aviza VTR Poly, Nitride
AVP BTBAS 560C Nitride, ONO |
| Atmospheric |
VTR for Oxide, Alloy, Passivation, AVP for Selective Oxidation |
| Wet Cleans |
DNS FC821 Immersion bench
FSI Mercury Spray Processor |
| Metrology |
KLAT ASET-F5X, Quantox, Optiprobe |
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| METALS – IMPLANT – RTA – CMP |
| Metals |
AMAT Endura AI, TiW, COTI, TiN (ESC & IMP), W/WN
Novellus C2 Altus W PNL |
| IMPLANT |
Axcelis 8200, 8250: 10–250keV, ESC/e-shower, 0-60deg tilt
Axcelis GSD Ultra: 2-180keV, high dose, 0-11deg tilt |
| RTA |
AG8108 & 8800i 675C-1100C, AMAT Centura RTP Spike Annealer |
| CMP |
Westech472 for Oxide, W plug
W Dual Damascene |
| CMP Cleans |
LAM/Ontrak DSS-200 Scrubber |
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| DEFECT & METROLOGY |
| Bare Wafer |
KLAT SP1 80nm |
| Brightfield |
KLAT 2365 60nm, 2139 100nm |
| Darkfield |
KLAT AIT, AIT XP Fusion |
| Voltage Contrast |
KLAT eS25 |
| SEM Review |
KLAT eV300-ADC & EDX |
| Data Analysis |
Synopsys Odyssey |
| Metrology |
DI 9000M AFM, QS-2200 FTIR, CV, film stress, 4-point probe |
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Sort / Test Tools
| SORT/TEST |
| Memory Test |
Verigy 3308/4108, Advantest 5365 |
| Logic Test |
Credence DUO, LT, Verigy 93000 |
| Fuse / Repair |
GSI M325 Laser |
| Clock Test, Burn-in |
Cypress OSC50, LCT |
| Visual QA |
Camtek Falcon 200 |
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Failure Analysis Tools
| FAILURE ANALYSIS |
| Imaging |
FEI DualBeam 835 FIB/SEM w/EDX
Hitachi S-4800 w/ T-E detector |
| TEM |
Hitachi TEM 300kV W/EDX |
| Nanoprobe |
Zyvex-100 Hitachi S4500 |
| Other Imaging |
Phemos OBIRCH
Acoustic Microscope |
| Sample Prep |
Microcleave, TEM sample prep, Deprocessor, Precision Polisher |
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