Fab Tools
Cypress can offer a wide variety of tools and associated processes, including 65nm node capabilities.
| MASK | | 193nm litho | ASML XT:1250  Sokudo RF3
/1100 200W | | 248nm litho | ASML /850, /750, /300 | | 365 nm litho | ASML /400, /250, /100 | | CD-SEM | AMAT VeraSem, Verity | | Registration | KLAT Archer AIM, 5300, 5200 | | Stabilization | Fusion 200 PCU | | Polyimide | 8.5µm Photo-imageable | | Reticle Handling | DMS with automated particle/pellicle damage detection and blow-off |
| | ETCH | | Oxide / Nitride Etch | AMAT Centura SuperE, EMAX, MxP | | Poly / Silicon Etch | AMAT DPS II, LAM 9400
4400 SE2 TCP | | Metal Etch | LAM 2300 Versys, LAM 9600 | | Wet Cleans | Akrion Gama wet benches
Semitool SST w/EKC265, SEZ DaVinci, SEZ 223 backside cleans | | Ash / Dry Strip | Novellus/Gasonics PEP 3010, Novellus Iridia, Mattson Aspen |
| | FILMS | | PECVD | Novellus C1 Nitride, Oxide, BPSG C2 TEOS, HDP for trench and PSG | | LPCVD | Aviza VTR Poly, Nitride
AVP BTBAS 560C Nitride, ONO | | Atmospheric | VTR for Oxide, Alloy, Passivation, AVP for Selective Oxidation | | Wet Cleans | DNS FC821 Immersion bench
FSI Mercury Spray Processor | | Metrology | KLAT ASET-F5X, Quantox, Optiprobe |
| | METALS – IMPLANT – RTA – CMP | | Metals | AMAT Endura AI, TiW, COTI, TiN (ESC & IMP), W/WN
Novellus C2 Altus W PNL | | IMPLANT | Axcelis 8200, 8250: 10–250keV, ESC/e-shower, 0-60deg tilt
Axcelis GSD Ultra: 2-180keV, high dose, 0-11deg tilt | | RTA | AG8108 & 8800i 675C-1100C, AMAT Centura RTP Spike Annealer | | CMP | Westech472 for Oxide, W plug
W Dual Damascene | | CMP Cleans | LAM/Ontrak DSS-200 Scrubber |
| | DEFECT & METROLOGY | | Bare Wafer | KLAT SP1 80nm | | Brightfield | KLAT 2365 60nm, 2139 100nm | | Darkfield | KLAT AIT, AIT XP Fusion | | Voltage Contrast | KLAT eS25 | | SEM Review | KLAT eV300-ADC & EDX | | Data Analysis | Synopsys Odyssey | | Metrology | DI 9000M AFM, QS-2200 FTIR, CV, film stress, 4-point probe |
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Sort / Test Tools
| SORT/TEST | | Memory Test | Verigy 3308/4108, Advantest 5365 | | Logic Test | Credence DUO, LT, Verigy 93000 | | Fuse / Repair | GSI M325 Laser | | Clock Test, Burn-in | Cypress OSC50, LCT | | Visual QA | Camtek Falcon 200 |
Failure Analysis Tools
| FAILURE ANALYSIS | | Imaging | FEI DualBeam 835 FIB/SEM w/EDX
Hitachi S-4800 w/ T-E detector | | TEM | Hitachi TEM 300kV W/EDX | | Nanoprobe | Zyvex-100 Hitachi S4500 | | Other Imaging | Phemos OBIRCH
Acoustic Microscope | | Sample Prep | Microcleave, TEM sample prep, Deprocessor, Precision Polisher |
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